Facilities

Facilities

Metrology

Metrology

Control and measuring support of all technological processes, as well as ample opportunities to study new materials

Probe Nanolaboratory

Auger electron spectrometry

IR Spectral Ellipsometry

Ultra-High Vacuum Atomic Force Microscopy

Nanofab Complex

Surface Inspection in IR Light

Particle Laser Analysis Systems

Optical Microscopy

Scanning Reflectometry

Stylus Profilometry

Scanning Electron Microscopy

News

Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

The device has an accuracy at the level of world leaders - no worse than 5% in the range of 0-30 µl / min

SEM image taken at FMN Laboratory took 2nd place in the microimage competition

Defects obtained in the silicon etching process have become artistic

Evolutionary selection growth of silver films for low-loss nanophotonic devices

A new method of the e-beam evaporation has been demonstrated

Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth

Unique technology by FMN Lab for nonlinear photonics and neural networks