Liquid treatment

Exhaust systems for working with organic and inorganic chemistry, including cleaning, etching, surface activation, and the lift-off process, as well as etching in hydrofluoric vapor

Vapor HF etching

organic chemistry

Inorganic chemistry

News

Work published

Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

The device has an accuracy at the level of world leaders - no worse than 5% in the range of 0-30 µl / min

SEM image taken at FMN Laboratory took 2nd place in the microimage competition

Defects obtained in the silicon etching process have become artistic

Work published

Evolutionary selection growth of silver films for low-loss nanophotonic devices

A new method of the e-beam evaporation has been demonstrated

Work published

Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth

Unique technology by FMN Lab for nonlinear photonics and neural networks