A unique set of equipment, including electron beam, laser, and optical lithography, thin-film deposition, plasma-chemical, liquid, steam etching and cleaning of a wide range of materials, bonding of wafers and all the necessary control and measurement methods, as well as the instruments to study new materials and prepare samples.
Nanostructure based on a dielectric grating (Al2O3), gasochromic oxide (WO3) and catalyst (Pd) is proposed as a hydrogen sensor working at the room temperature.
Electro-optical modulation technologies developed at FMN Laboratory allow processing or sending a video signal immediately without converting it to electronic