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Facilities
Research capabilities

Facilities

Facilities

Research capabilities

Research Capabilities

A unique set of equipment, including electron beam, laser, and optical lithography, thin-film deposition, plasma-chemical, liquid, steam etching and cleaning of a wide range of materials, bonding of wafers and all the necessary control and measurement methods, as well as the instruments to study new materials and prepare samples.

Thermal processes

Sample preparation and assembly

Liquid treatment

Vacuum deposition

News

Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

The device has an accuracy at the level of world leaders - no worse than 5% in the range of 0-30 µl / min

SEM image taken at FMN Laboratory took 2nd place in the microimage competition

Defects obtained in the silicon etching process have become artistic

Evolutionary selection growth of silver films for low-loss nanophotonic devices

A new method of the e-beam evaporation has been demonstrated

Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth

Unique technology by FMN Lab for nonlinear photonics and neural networks