Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics
The device has an accuracy at the level of world leaders - no worse than 5% in the range of 0-30 µl / min
Nanofab 100 Complex, NT MDT (Russia)
The complex is intended for carrying out ion-beam etching processes using a sharply focused ion beam, as well as nanomanipulation using probe methods.
Characteristics of the FIP module (focused ion beams):
Characteristics of the AFM module (atomic force microscopy):