Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics
The device has an accuracy at the level of world leaders - no worse than 5% in the range of 0-30 µl / min
The publication provides a comparative analysis of new product development principles in microelectronics, mechanical engineering, and MEMS production is carried out. A MEMS integrated digital modeling approach is proposed based on the formation of a knowledge base, including a description of basic structural elements and basic tested process sequences for their manufacture.
Thermoelectric MEMS switches
Digital design as a key approach to shortening MEMS development cycle
Mihail M. Andronic, Ilya A. Rodionov, Yuriy B. Tsvetkov
ITM Web Conf. Volume 35, 2020