Изготовлены первые функциональные суб-100 нм структуры

11 december 2015

В ходе выполнения исследований по одной из НИОКР центра разработана технология изготовления функциональных суб-100 нм структур.

Разработан весь цикл операций изготовления функциональных структур (очистка – подготовка поверхности – осаждение – литография – травление) по техническому заданию заказчика.

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