
Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics
The device has an accuracy at the level of world leaders - no worse than 5% in the range of 0-30 µl / min
FMN Lab team took part in the microimage competition, held by the Russian community of microscopists.
The winning image shows the results of deep ion etching of silicon, one of the stages in the development of the technology for manufacturing MEMS devices. Lines that were meant to be parallel have blindly merged. The “rings” on these lines are the etching steps.
It reminded us of the painting “Lovers” by the Belgian artist Rene Magritte.