Auger Electron Spectrometry

Auger-electronic spectrometer

The device is intended for chemical and elemental analysis of the surface of samples, layer-by-layer study of the profile of multilayer nanoscale structures, quantitative analysis and determination of the concentration of chemical elements of the sample under study.

Key features and capabilities:

minimum diameter of an electron beam: 50 microns;

energy range of an electron beam: from 0 to 5000 eV;

Ar + ion etching ion gun; minimum ion beam diameter: 125 microns;

ion beam energy range: from 200 to 5,000 eV;

ion beam current: from 1 pA to 10 μA;

particle energy registration range: from 0 to 3500 eV;

registration of all chemical elements in the periodic table of elements with the exception of H and He;

concentration sensitivity: 0.01%;

maximum diameter of the analyzed sample: 25.4 mm.

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FMN Lab team participated in the “AnalitBioPribor 2023” conference

A team of bionanotechnologists part in the II Annual All-Russian Youth Conference on methods and instruments for the analysis of biological objects “AnalyBioPribor 2023”.