
Bauman Sci-Pub Challenge 2024: команда НОЦ ФМН в призах
Руководитель центра Илья Родионов и аспиранты Дарья Москалева и Никита Коршаков заняли 4-е место в общеуниверситетском рейтинге публикаций
In narrow-period structures, FMN Laboratory achieved ultra-high resolution of the electron beam lithography process close to the limit values declared by the manufacturer of the HSQ resist: 7nm on two-dimensional periodic gratings and 11nm on one-dimensional gratings.
This outstanding achievement has confirmed not only the highest quality of the developed cycle of technological operations (surface preparation -> applying resists -> electronic lithography -> development), but also the efficiency and reliability of the implemented cleanroom infrastructure subsystems.